As a new generation of fluorine-containing electronic gases, high-purity monofluoromethane plays a key role in highly selective dielectric etching, logic chip self-aligning contact holes, atomic layer precision etching, and advanced packaging (through-silicon via insulation layer etching and RDL rewiring layer) due to its special physical and chemical properties in semiconductor manufacturing, gradually replacing traditional high-GWP gases. This product has the advantages of ultra-high purity, which can meet the requirements of customers for a variety of packaging and cylinder joints.