High-purity Carbon Dioxide (CO2)
Grade: 5N
Packaging Specifications:40L cylinder
Detailed Introduction
Product Introduction Page: Main Applications: Cleaning and etching processes in semiconductor wafer fabrication
In semiconductors, high-purity carbon dioxide is a versatile process gas and supercritical fluid, widely used in processes such as supercritical cleaning, dry etching, wafer cooling and thermal management, as well as in deposition process innovation and advanced packaging, becoming a core medium for sustainable semiconductor manufacturing. This product features advantages such as ultra-high purity and can meet various customer requirements for packaging and cylinder connections.