Due to its excellent reducing properties and process compatibility, high-purity hydrogen is a key process gas in semiconductor manufacturing. It is widely used in chemical vapor deposition processes such as polysilicon deposition and epitaxy; annealing processes such as high-temperature annealing and post-metalization annealing; etching processes such as pre-cleaning before tungsten deposition and selective etching of silicon nitride; and reduction reactions such as metal oxide reduction and process chamber cleaning.